Reconstruction of surfaces using input micrographs with various magnifications. Three-dimensional surfaces have been generated based on electron micrographs of 150 nm-thick titanium thin films at 30000× (a), 70000× (b), 90000× (c) and 150000× (d) magnifications. Color scales have been calibrated via AFM roughness data. Three-dimensional surfaces generated based on AFM scans of corresponding surface areas are presented in the right column. The surface features in AFM scans appear to be more regular than in SEM 3D displacement maps, due to the effects of tip convolution on AFM data.